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Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2016-11-29 |
| 9488923 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2016-11-08 |
| 9482962 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2016-11-01 |
| 9482966 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Erik Roelof Loopstra +8 more |
2016-11-01 |
| 9477153 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2016-10-25 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2016-10-25 |
| 9436097 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net, Franciscus Johannes Herman Maria Teunissen +4 more |
2016-09-06 |
| 9366972 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2016-06-14 |
| 9285686 |
Lithographic apparatus involving an immersion liquid supply system with an aperture |
Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Leon Joseph Maria Van Den Schoor, Sjoerd Nicolaas Lambertus Donders +1 more |
2016-03-15 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9229335 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2016-01-05 |