| 9482966 |
Lithographic apparatus and device manufacturing method |
Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +8 more |
2016-11-01 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2016-10-25 |
| 9383655 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Antonius Theodorus Anna Maria Derksen, Klaus Simon, Alexander Straaijer |
2016-07-05 |
| 9366972 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2016-06-14 |
| 9360765 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2016-06-07 |
| 9329500 |
Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor |
Frank Staals, Erik Roelof Loopstra, Wim Tjibbo Tel, Bearrach Moest |
2016-05-03 |
| 9269531 |
Backscatter reduction in thin electron detectors |
Michael Alwin William Stekelenburg, Gerrit Cornelis van Hoften, Richard Henderson, Gregory James McMullan, Abdul Raffey Faruqi +3 more |
2016-02-23 |