Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9360769 | Method of determining focus corrections, lithographic processing cell and device manufacturing method | Arend Johannes Kisteman, Thomas Theeuwes, Antoine Gaston Marie Kiers | 2016-06-07 |
| 9360770 | Method of determining focus corrections, lithographic processing cell and device manufacturing method | Arend Johannes Kisteman, Thomas Theeuwes, Antoine Gaston Marie Kiers | 2016-06-07 |
| 9329500 | Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor | Frank Staals, Joeri Lof, Erik Roelof Loopstra, Bearrach Moest | 2016-05-03 |