Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494869 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot +9 more | 2016-11-15 |
| 9442394 | Multi-stage system, a control method therefor, and a lithographic apparatus | Johannes Petrus Martinus Bernardus Vermeulen | 2016-09-13 |
| 9378722 | Lithographic apparatus with actuator to compensate acoustic vibration | Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Peter Paul HEMPENIUS, Youssef Karel Maria De Vos, Joost De Pee +5 more | 2016-06-28 |
| 9366972 | Lithographic apparatus and device manufacturing method | Joeri Lof, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more | 2016-06-14 |
| 9329501 | Lithographic apparatus, method of deforming a substrate table and device manufacturing method | Yang-Shan Huang, Jan Van Eijk, Sven Antoin Johan Hol, Engelbertus Antonius Fransiscus Van Der Pasch, Bastiaan Lambertus Wilhelmus Marinus Van De Ven +3 more | 2016-05-03 |
| 9304404 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Juergen Fischer, Ulrich Schoenhoff, Bernhard Geuppert, Robertus Johannes Marinus De Jongh | 2016-04-05 |
| 9261799 | Movable support, position control system, lithographic apparatus and method of controlling a position of an exchangeable object | — | 2016-02-16 |
| 9229339 | Positioning system, a lithographic apparatus and a method for positional control | Henrikus Herman Marie Cox | 2016-01-05 |