Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more | 2016-11-15 |
| 9378722 | Lithographic apparatus with actuator to compensate acoustic vibration | Hans Butler, Johan Geerke, Peter Paul HEMPENIUS, Youssef Karel Maria De Vos, Joost De Pee +5 more | 2016-06-28 |