Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Harmen Klaas Van Der Schoot +9 more | 2016-11-15 |
| 9494878 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Edwin Johan Buis, Gosse Charles De Vries, Erik Maria Rekkers | 2016-11-15 |
| 9329501 | Lithographic apparatus, method of deforming a substrate table and device manufacturing method | Yang-Shan Huang, Hans Butler, Jan Van Eijk, Engelbertus Antonius Fransiscus Van Der Pasch, Bastiaan Lambertus Wilhelmus Marinus Van De Ven +3 more | 2016-05-03 |
| 9293951 | Lithographic apparatus and lorentz actuator | Fidelus Adrianus Boon, Hendrikus Pascal Gerardus Johannes Van Agtmaal, Abdelhamid Kechroud, Peter Michel Silvester Maria Heijmans | 2016-03-22 |