Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9389518 | Stage system and a lithographic apparatus | Antonius Franciscus Johannes De Groot, Raymond Wilhelmus Louis Lafarre, Sander Christiaan Broers, Peter Laurentius Maria Ros | 2016-07-12 |
| 9329501 | Lithographic apparatus, method of deforming a substrate table and device manufacturing method | Hans Butler, Jan Van Eijk, Sven Antoin Johan Hol, Engelbertus Antonius Fransiscus Van Der Pasch, Bastiaan Lambertus Wilhelmus Marinus Van De Ven +3 more | 2016-05-03 |
| 9261798 | Lithographic apparatus and device manufacturing method | Theodorus Petrus Maria Cadee | 2016-02-16 |