Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507275 | Support apparatus, lithographic apparatus and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Christiaan Alexander Hoogendam +6 more | 2016-11-29 |
| 9389518 | Stage system and a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Yang-Shan Huang, Sander Christiaan Broers, Peter Laurentius Maria Ros | 2016-07-12 |