Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9389518 | Stage system and a lithographic apparatus | Antonius Franciscus Johannes De Groot, Raymond Wilhelmus Louis Lafarre, Yang-Shan Huang, Peter Laurentius Maria Ros | 2016-07-12 |