Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513561 | Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method | Martinus Hendricus Hoeks, Theodorus Petrus Maria Cadee | 2016-12-06 |
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot +9 more | 2016-11-15 |
| 9341960 | Lithographic apparatus and device manufacturing method | Antonius Johannes Josephus Van Dijsseldonk | 2016-05-17 |
| 9304077 | Inspection apparatus and method | Lucas Henricus Johannes Stevens | 2016-04-05 |