Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more | 2016-11-15 |
| 9482960 | Pellicle for reticle and multilayer mirror | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Lucas Henricus Johannes Stevens, Maarten Van Kampen | 2016-11-01 |
| 9395630 | Lithographic apparatus and method | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Lucas Henricus Johannes Stevens, Maarten Van Kampen | 2016-07-19 |