Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482960 | Pellicle for reticle and multilayer mirror | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens | 2016-11-01 |
| 9395630 | Lithographic apparatus and method | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens | 2016-07-19 |
| 9354529 | Arrangement for use in a projection exposure tool for microlithography having a reflective optical element | Dirk Heinrich Ehm, Stefan Schmidt, Vadim Yevgenyevich Banine, Erik Roelof Loopstra | 2016-05-31 |