| 9529283 |
Radiation source, lithographic apparatus, and device manufacturing method |
Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Leonid Aizikovitch Sjmaenok |
2016-12-27 |
| 9482960 |
Pellicle for reticle and multilayer mirror |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-11-01 |
| 9465306 |
Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device |
Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer |
2016-10-11 |
| 9448492 |
Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus |
Denis Alexandrovich Glushkov, Vladimir Nikolaevich Polkovnikov, Nikolay Nikolaevitch Salashchenko, Leonid Aizikovitch Sjmaenok |
2016-09-20 |
| 9442380 |
Method and apparatus for generating radiation |
Ramin Badie, Vadim Yevgenyevich Banine, Johan Frederik Dijksman, Antonius Theodorus Wilhelmus Kempen, Hendrikus Robertus Marie Van Greevenbroek +1 more |
2016-09-13 |
| 9411238 |
Source-collector device, lithographic apparatus, and device manufacturing method |
Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen, Olav Waldemar Vladimir Frijns +5 more |
2016-08-09 |
| 9395630 |
Lithographic apparatus and method |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-07-19 |
| 9377695 |
Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device |
Vadim Yevgenyevich Banine, Olav Waldemar Vladimir Frijns |
2016-06-28 |
| 9366967 |
Radiation source |
Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Gerardus Hubertus Petrus Maria Swinkels, Jan Bernard Plechelmus Van Schoot |
2016-06-14 |
| 9329503 |
Multilayer mirror |
Vadim Iourievich Timoshkov, Jan Bernard Plechelmus Van Schoot, Antonius Theodorus Wilhelmus Kempen, Edgar Alberto Osorio Oliveros |
2016-05-03 |
| 9298110 |
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device |
Jens Arno Steinhoff, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Erik Roelof Loopstra, Hendrik Antony Johannes Neerhof +2 more |
2016-03-29 |
| 9285690 |
Mirror, lithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Leonid Aizikovitch Sjmaenok |
2016-03-15 |
| 9261784 |
Lithographic patterning process and resists to use therein |
Sander Frederik Wuister, Vladimir Mihailovitch Krivtsun |
2016-02-16 |