Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9462667 | Radiation source and lithographic apparatus | Johan Frederik Dijksman, Ronald Johannes Hultermans, Antonius Theodorus Wilhelmus Kempen | 2016-10-04 |
| 9442380 | Method and apparatus for generating radiation | Vadim Yevgenyevich Banine, Johan Frederik Dijksman, Antonius Theodorus Wilhelmus Kempen, Andrei Mikhailovich Yakunin, Hendrikus Robertus Marie Van Greevenbroek +1 more | 2016-09-13 |
| 9298107 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens +5 more | 2016-03-29 |