Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9510432 | Radiation source and lithographic apparatus | Johan Frederik Dijksman, Wilbert Jan Mestrom | 2016-11-29 |
| 9462667 | Radiation source and lithographic apparatus | Johan Frederik Dijksman, Ronald Johannes Hultermans, Ramin Badie | 2016-10-04 |
| 9442380 | Method and apparatus for generating radiation | Ramin Badie, Vadim Yevgenyevich Banine, Johan Frederik Dijksman, Andrei Mikhailovich Yakunin, Hendrikus Robertus Marie Van Greevenbroek +1 more | 2016-09-13 |
| 9329503 | Multilayer mirror | Vadim Iourievich Timoshkov, Jan Bernard Plechelmus Van Schoot, Andrei Mikhailovich Yakunin, Edgar Alberto Osorio Oliveros | 2016-05-03 |