| 9414477 |
Radiation source, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels |
2016-08-09 |
| 9411238 |
Source-collector device, lithographic apparatus, and device manufacturing method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Martinus Cornelis Maria Verhagen, Olav Waldemar Vladimir Frijns +5 more |
2016-08-09 |
| 9372413 |
Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devices |
Gosse Charles De Vries, Franciscus Johannes Joseph Janssen, Nicolaas Aldegonda Jan Maria Van Aerle |
2016-06-21 |
| 9366967 |
Radiation source |
Andrei Mikhailovich Yakunin, Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Gerardus Hubertus Petrus Maria Swinkels |
2016-06-14 |
| 9363879 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +4 more |
2016-06-07 |
| 9329503 |
Multilayer mirror |
Vadim Iourievich Timoshkov, Antonius Theodorus Wilhelmus Kempen, Andrei Mikhailovich Yakunin, Edgar Alberto Osorio Oliveros |
2016-05-03 |
| 9316929 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation |
Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more |
2016-04-19 |
| 9285685 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graupner +1 more |
2016-03-15 |