Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9316929 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2016-04-19 |