Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442381 | Method of operating a projection exposure tool for microlithography | Olaf Conradi, Michael Totzeck, Dirk Juergens, Ralf Mueller, Christian Wald | 2016-09-13 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2016-09-06 |
| 9316922 | Lithography projection objective, and a method for correcting image defects of the same | Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer, Norbert Wabra | 2016-04-19 |
| 9316929 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Oliver Natt, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2016-04-19 |