Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442381 | Method of operating a projection exposure tool for microlithography | Olaf Conradi, Ulrich Loering, Dirk Juergens, Ralf Mueller, Christian Wald | 2016-09-13 |
| 9411145 | Test sample device and test method for an optical microscope with subwavelength resolution | Thomas Kalkbrenner | 2016-08-09 |
| 9304405 | Microlithography illumination system and microlithography illumination optical unit | Damian Fiolka, Hartmut Enkisch, Stephan Muellender | 2016-04-05 |