Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341958 | Deflection mirror and projection exposure apparatus for microlithography comprising such a deflection mirror | Stephan Muellender, Martin Endres | 2016-05-17 |
| 9304405 | Microlithography illumination system and microlithography illumination optical unit | Damian Fiolka, Michael Totzeck, Stephan Muellender | 2016-04-05 |
| 9285515 | Imaging optical system and projection exposure system including the same | Hans-Juergen Mann, Wilheim Ulrich, Stephan Muellender | 2016-03-15 |