Issued Patents 2016
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529276 | Microlithography projection exposure apparatus having at least two operating states | Winfried Kaiser | 2016-12-27 |
| 9500958 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | David Shafer | 2016-11-22 |
| 9482961 | Microlithography projection optical system, tool and method of production | Wilhelm Ulrich | 2016-11-01 |
| 9482794 | Magnifying imaging optical unit and metrology system including same | — | 2016-11-01 |
| 9465300 | Catoptric objectives and systems using catoptric objectives | Wilhelm Ulrich, Marco Pretorius | 2016-10-11 |
| 9459539 | Imaging optical unit for a projection exposure apparatus | Christoph Menke, Susanne Beder | 2016-10-04 |
| 9442386 | Imaging optics | — | 2016-09-13 |
| 9436101 | Optical arrangement and microlithographic projection exposure apparatus including same | Armin Schoeppach, Frank Eisert, Yim-Bun Patrick Kwan | 2016-09-06 |
| 9366968 | Anamorphically imaging projection lens system and related optical systems, projection exposure systems and methods | — | 2016-06-14 |
| 9316918 | EUV collector | Wolfgang Singer | 2016-04-19 |
| 9304408 | Projection objective for microlithography | Johannes Zellner, Martin Endres | 2016-04-05 |
| 9304407 | Catoptric objectives and systems using catoptric objectives | David Shafer, Wilhelm Ulrich | 2016-04-05 |
| 9298100 | Imaging optical system | — | 2016-03-29 |
| 9285515 | Imaging optical system and projection exposure system including the same | Wilheim Ulrich, Stephan Muellender, Hartmut Enkisch | 2016-03-15 |
| 9244361 | Imaging optical system | Ralf Mueller | 2016-01-26 |
| 9239521 | Projection optics for microlithography | — | 2016-01-19 |