Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500958 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | Hans-Juergen Mann | 2016-11-22 |
| 9377414 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, Richard W. Solarz, Bin-Ming Benjamin Tsai, David L. Brown | 2016-06-28 |
| 9304407 | Catoptric objectives and systems using catoptric objectives | Hans-Juergen Mann, Wilhelm Ulrich | 2016-04-05 |