Issued Patents 2016
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529182 | 193nm laser and inspection system | J. Joseph Armstrong, Yujun Deng, Justin Dianhuan Liou, Vladimir Dribinski, John Fielden | 2016-12-27 |
| 9525265 | Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms | Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden | 2016-12-20 |
| 9509112 | CW DUV laser with improved stability | Xiaoxu Lu, John Fielden | 2016-11-29 |
| 9496425 | Back-illuminated sensor with boron layer | Jehn-Huar Chern, Ali R. Ehsani, Gildardo Delgado, David L. Brown, John Fielden | 2016-11-15 |
| 9494531 | Multi-spot illumination for improved detection sensitivity | Xiaoxu Lu, John Fielden, Ivan Maleev | 2016-11-15 |
| 9478402 | Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor | David L. Brown, John Fielden | 2016-10-25 |
| 9459215 | Passivation of nonlinear optical crystals | Vladimir Dribinski | 2016-10-04 |
| 9462206 | Integrated multi-channel analog front end and digitizer for high speed imaging applications | David L. Brown, Mansour Kermat, Lance Glasser, Henrik Nielsen, Guowu Zheng +3 more | 2016-10-04 |
| 9461435 | Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population | Vladimir Dribinski | 2016-10-04 |
| 9448184 | Method and system for determining one or more optical characteristics of structure of a semiconductor wafer | Xuefeng Liu, John Fielden | 2016-09-20 |
| 9426400 | Method and apparatus for high speed acquisition of moving images using pulsed illumination | David L. Brown, Yury Yuditsky | 2016-08-23 |
| 9419407 | Laser assembly and inspection system using monolithic bandwidth narrowing apparatus | Yujun Deng, J. Joseph Armstrong, Vladimir Dribinski, John Fielden | 2016-08-16 |
| 9413134 | Multi-stage ramp-up annealing for frequency-conversion crystals | Vladimir Dribinski, J. Joseph Armstrong | 2016-08-09 |
| 9410901 | Image sensor, an inspection system and a method of inspecting an article | Jingjing Zhang, John Fielden | 2016-08-09 |
| 9377414 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Richard W. Solarz, David Shafer, Bin-Ming Benjamin Tsai, David L. Brown | 2016-06-28 |
| 9347890 | Low-noise sensor and an inspection system using a low-noise sensor | David L. Brown, John Fielden | 2016-05-24 |
| 9318869 | 193nm laser and inspection system | J. Joseph Armstrong, Vladimir Dribinski, Yujun Deng, John Fielden | 2016-04-19 |
| 9310296 | Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Thaddeus Gerard Dziura, Bin-Ming Benjamin Tsai, Xuefeng Liu, John J. Hench | 2016-04-12 |
| 9299738 | Interposer based imaging sensor for high-speed image acquisition and inspection systems | David L. Brown, Guowu Zheng, Venkatraman Iyer | 2016-03-29 |
| 9293882 | Low noise, high stability, deep ultra-violet, continuous wave laser | — | 2016-03-22 |
| 9250178 | Passivation of nonlinear optical crystals | Vladimir Dribinski | 2016-02-02 |