Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529182 | 193nm laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng, Vladimir Dribinski, John Fielden | 2016-12-27 |
| 9525265 | Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms | Yung-Ho Alex Chuang, Xiaoxu Lu, J. Joseph Armstrong, Yujun Deng, John Fielden | 2016-12-20 |