Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490182 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Noam Sapiens, Stilian Ivanov Pandev | 2016-11-08 |
| 9435735 | Optical parametric model optimization | — | 2016-09-06 |
| 9310296 | Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, Xuefeng Liu, John J. Hench | 2016-04-12 |
| 9311431 | Secondary target design for optical measurements | Sungchul Yoo, Andrei V. Shchegrov, Inkyo Kim, Seunghwan Lee, ByeoungSu Hwang +1 more | 2016-04-12 |
| 9255877 | Metrology system optimization for parameter tracking | Andrei Veldman, Andrei V. Shchegrov, Gregory Brady, Stilian Ivanov Pandev, Alexander Kuznetsov | 2016-02-09 |