Issued Patents 2016
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518916 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Gregory Brady, Noam Sapiens, John J. Hench | 2016-12-13 |
| 9512985 | Systems for providing illumination in optical metrology | Gregory Brady, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin, Ilya Bezel +16 more | 2016-12-06 |
| 9490182 | Measurement of multiple patterning parameters | Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Noam Sapiens, Stilian Ivanov Pandev | 2016-11-08 |
| 9412673 | Multi-model metrology | In-Kyo Kim, Xin Li, Leonid Poslavsky, Liequan Lee, Meng Cao +2 more | 2016-08-09 |
| 9400246 | Optical metrology tool equipped with modulated illumination sources | Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2016-07-26 |
| 9311431 | Secondary target design for optical measurements | Sungchul Yoo, Thaddeus Gerard Dziura, Inkyo Kim, Seunghwan Lee, ByeoungSu Hwang +1 more | 2016-04-12 |
| 9310290 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer +3 more | 2016-04-12 |
| 9291554 | Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspection | Alexander Kuznetsov, Kevin Peterlinz, Leonid Poslavsky, Xuefeng Liu | 2016-03-22 |
| 9255877 | Metrology system optimization for parameter tracking | Andrei Veldman, Gregory Brady, Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Alexander Kuznetsov | 2016-02-09 |
| 9243886 | Optical metrology of periodic targets in presence of multiple diffraction orders | Alexander Kuznetsov, Kevin Peterlinz | 2016-01-26 |