Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442063 | Measurement of composition for thin films | Ming Di, Torsten R. Kaack, Qiang Zhao, Xiang Gao | 2016-09-13 |
| 9412673 | Multi-model metrology | In-Kyo Kim, Xin Li, Liequan Lee, Meng Cao, Sungchul Yoo +2 more | 2016-08-09 |
| 9405290 | Model for optical dispersion of high-K dielectrics including defects | Natalia Malkova | 2016-08-02 |
| 9347872 | Meta-model based measurement refinement | Lie-Quan Lee | 2016-05-24 |
| 9311431 | Secondary target design for optical measurements | Sungchul Yoo, Andrei V. Shchegrov, Thaddeus Gerard Dziura, Inkyo Kim, Seunghwan Lee +1 more | 2016-04-12 |
| 9291554 | Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspection | Alexander Kuznetsov, Kevin Peterlinz, Andrei V. Shchegrov, Xuefeng Liu | 2016-03-22 |
| 9239522 | Method of determining an asymmetric property of a structure | Meng-Fu Shih, In-Kyo Kim, Xiafang Zhang | 2016-01-19 |