Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490182 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Thaddeus Gerard Dziura, Noam Sapiens, Stilian Ivanov Pandev | 2016-11-08 |
| 9400246 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Gregory Brady +1 more | 2016-07-26 |
| 9291554 | Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspection | Alexander Kuznetsov, Andrei V. Shchegrov, Leonid Poslavsky, Xuefeng Liu | 2016-03-22 |
| 9243886 | Optical metrology of periodic targets in presence of multiple diffraction orders | Alexander Kuznetsov, Andrei V. Shchegrov | 2016-01-26 |
| 9228943 | Dynamically adjustable semiconductor metrology system | David Y. Wang, Guorong V. Zhuang, Johannes D. de Veer, Shankar Krishnan | 2016-01-05 |