Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518916 | Compressive sensing for metrology | Stilian Ivanov Pandev, Gregory Brady, Andrei V. Shchegrov, Noam Sapiens, John J. Hench | 2016-12-13 |
| 9291554 | Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspection | Kevin Peterlinz, Andrei V. Shchegrov, Leonid Poslavsky, Xuefeng Liu | 2016-03-22 |
| 9255877 | Metrology system optimization for parameter tracking | Andrei Veldman, Andrei V. Shchegrov, Gregory Brady, Thaddeus Gerard Dziura, Stilian Ivanov Pandev | 2016-02-09 |
| 9243886 | Optical metrology of periodic targets in presence of multiple diffraction orders | Kevin Peterlinz, Andrei V. Shchegrov | 2016-01-26 |