Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518916 | Compressive sensing for metrology | Alexander Kuznetsov, Gregory Brady, Andrei V. Shchegrov, Noam Sapiens, John J. Hench | 2016-12-13 |
| 9490182 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Noam Sapiens | 2016-11-08 |
| 9383661 | Methods and apparatus for determining focus | — | 2016-07-05 |
| 9255877 | Metrology system optimization for parameter tracking | Andrei Veldman, Andrei V. Shchegrov, Gregory Brady, Thaddeus Gerard Dziura, Alexander Kuznetsov | 2016-02-09 |