Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518916 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Andrei V. Shchegrov, Noam Sapiens, John J. Hench | 2016-12-13 |
| 9512985 | Systems for providing illumination in optical metrology | Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin, Ilya Bezel +16 more | 2016-12-06 |
| 9400246 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz +1 more | 2016-07-26 |
| 9310290 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer +3 more | 2016-04-12 |
| 9255877 | Metrology system optimization for parameter tracking | Andrei Veldman, Andrei V. Shchegrov, Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Alexander Kuznetsov | 2016-02-09 |