AS

Anatoly Shchemelinin

KL Kla-Tencor: 9 patents #5 of 327Top 2%
📍 Bozeman, MT: #3 of 78 inventorsTop 4%
🗺 Montana: #4 of 286 inventorsTop 2%
Overall (2016): #9,094 of 481,213Top 2%
9
Patents 2016

Issued Patents 2016

Showing 1–9 of 9 patents

Patent #TitleCo-InventorsDate
9526158 Laser-sustained plasma light source Ilya Bezel, Yanming Zhao, Gildardo Delgado 2016-12-20
9512985 Systems for providing illumination in optical metrology Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Ilya Bezel +16 more 2016-12-06
9516733 Laser-sustained plasma light source Ilya Bezel, Yanming Zhao, Gildardo Delgado 2016-12-06
9433070 Plasma cell with floating flange Ilya Bezel, Amir Torkaman 2016-08-30
9390902 Method and system for controlling convective flow in a light-sustained plasma Ilya Bezel, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao +2 more 2016-07-12
9390892 Laser sustained plasma light source with electrically induced gas flow Ilya Bezel 2016-07-12
9318311 Plasma cell for laser-sustained plasma light source Anant Chimmalgi, Ilya Bezel, Rajeev Patil 2016-04-19
9263238 Open plasma lamp for forming a light-sustained plasma Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Matthew Derstine, Gildardo Delgado 2016-02-16
9232622 Gas refraction compensation for laser-sustained plasma bulbs Ilya Bezel, Alex Salnik, Anant Chimmalgi 2016-01-05