IB

Ilya Bezel

KL Kla-Tencor: 10 patents #3 of 327Top 1%
Overall (2016): #6,867 of 481,213Top 2%
10
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9530636 Light source with nanostructured antireflection layer Sebaek Oh, Anant Chimmalgi, Rahul Yadav, Matthew Derstine 2016-12-27
9526158 Laser-sustained plasma light source Anatoly Shchemelinin, Yanming Zhao, Gildardo Delgado 2016-12-20
9512985 Systems for providing illumination in optical metrology Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more 2016-12-06
9516733 Laser-sustained plasma light source Anatoly Shchemelinin, Yanming Zhao, Gildardo Delgado 2016-12-06
9433070 Plasma cell with floating flange Anatoly Shchemelinin, Amir Torkaman 2016-08-30
9390902 Method and system for controlling convective flow in a light-sustained plasma Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao +2 more 2016-07-12
9390892 Laser sustained plasma light source with electrically induced gas flow Anatoly Shchemelinin 2016-07-12
9318311 Plasma cell for laser-sustained plasma light source Anant Chimmalgi, Anatoly Shchemelinin, Rajeev Patil 2016-04-19
9263238 Open plasma lamp for forming a light-sustained plasma Lauren Wilson, Anant Chimmalgi, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado 2016-02-16
9232622 Gas refraction compensation for laser-sustained plasma bulbs Anatoly Shchemelinin, Alex Salnik, Anant Chimmalgi 2016-01-05