| 9530636 |
Light source with nanostructured antireflection layer |
Sebaek Oh, Anant Chimmalgi, Rahul Yadav, Matthew Derstine |
2016-12-27 |
| 9526158 |
Laser-sustained plasma light source |
Anatoly Shchemelinin, Yanming Zhao, Gildardo Delgado |
2016-12-20 |
| 9512985 |
Systems for providing illumination in optical metrology |
Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more |
2016-12-06 |
| 9516733 |
Laser-sustained plasma light source |
Anatoly Shchemelinin, Yanming Zhao, Gildardo Delgado |
2016-12-06 |
| 9433070 |
Plasma cell with floating flange |
Anatoly Shchemelinin, Amir Torkaman |
2016-08-30 |
| 9390902 |
Method and system for controlling convective flow in a light-sustained plasma |
Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao +2 more |
2016-07-12 |
| 9390892 |
Laser sustained plasma light source with electrically induced gas flow |
Anatoly Shchemelinin |
2016-07-12 |
| 9318311 |
Plasma cell for laser-sustained plasma light source |
Anant Chimmalgi, Anatoly Shchemelinin, Rajeev Patil |
2016-04-19 |
| 9263238 |
Open plasma lamp for forming a light-sustained plasma |
Lauren Wilson, Anant Chimmalgi, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado |
2016-02-16 |
| 9232622 |
Gas refraction compensation for laser-sustained plasma bulbs |
Anatoly Shchemelinin, Alex Salnik, Anant Chimmalgi |
2016-01-05 |