Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9526158 | Laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Yanming Zhao | 2016-12-20 |
| 9516733 | Laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Yanming Zhao | 2016-12-06 |
| 9496425 | Back-illuminated sensor with boron layer | Jehn-Huar Chern, Ali R. Ehsani, David L. Brown, Yung-Ho Alex Chuang, John Fielden | 2016-11-15 |
| 9389180 | Methods and apparatus for use with extreme ultraviolet light having contamination protection | Francis Chilese, John R. Torczynski, Rudy F. Garcia, Leonard E. Klebanoff, Daniel J. Rader +2 more | 2016-07-12 |
| 9335637 | Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation | Daniel Wack | 2016-05-10 |
| 9335279 | Pre and post cleaning of mask, wafer, optical surfaces for prevention of contamination prior to and after inspection | — | 2016-05-10 |
| 9277634 | Apparatus and method for multiplexed multiple discharge plasma produced sources | — | 2016-03-01 |
| 9263238 | Open plasma lamp for forming a light-sustained plasma | Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine | 2016-02-16 |
| 9244368 | Particle control near reticle and optics using showerhead | Frank Chilese, Rudy F. Garcia, John R. Torczynski, Anthony S. Geller, Daniel J. Rader +2 more | 2016-01-26 |