Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448343 | Segmented mirror apparatus for imaging and method of using the same | Damon F. Kvamme | 2016-09-20 |
| 9348214 | Spectral purity filter and light monitor for an EUV reticle inspection system | Daimian Wang, Li-Ping Wang, David Alles | 2016-05-24 |
| 9244368 | Particle control near reticle and optics using showerhead | Gildardo Delgado, Rudy F. Garcia, John R. Torczynski, Anthony S. Geller, Daniel J. Rader +2 more | 2016-01-26 |