Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9389180 | Methods and apparatus for use with extreme ultraviolet light having contamination protection | Francis Chilese, Rudy F. Garcia, Leonard E. Klebanoff, Gildardo Delgado, Daniel J. Rader +2 more | 2016-07-12 |
| 9244368 | Particle control near reticle and optics using showerhead | Gildardo Delgado, Frank Chilese, Rudy F. Garcia, Anthony S. Geller, Daniel J. Rader +2 more | 2016-01-26 |