Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9422978 | Gas bearing assembly for an EUV light source | Francis Chilese | 2016-08-23 |
| 9389180 | Methods and apparatus for use with extreme ultraviolet light having contamination protection | Francis Chilese, John R. Torczynski, Leonard E. Klebanoff, Gildardo Delgado, Daniel J. Rader +2 more | 2016-07-12 |
| 9244368 | Particle control near reticle and optics using showerhead | Gildardo Delgado, Frank Chilese, John R. Torczynski, Anthony S. Geller, Daniel J. Rader +2 more | 2016-01-26 |