Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9462694 | Spacer layer for embedding semiconductor die | Junrong Yan, Weili Wang, Pradeep Rai, Xin Lu, Jianbin Gu +1 more | 2016-10-04 |
| 9453801 | Photoemission monitoring of EUV mirror and mask surface contamination in actinic EUV systems | Daimian Wang, Yanwei Liu, Alan Aindow | 2016-09-27 |
| 9348214 | Spectral purity filter and light monitor for an EUV reticle inspection system | Daimian Wang, Frank Chilese, David Alles | 2016-05-24 |
| 9330885 | Method of stack patterning using a ion etching | Michael Feldbaum, Justin Jia-Jen Hwu, David S. Kuo, Gennady Gauzner | 2016-05-03 |
| 9284649 | Method of patterning a stack | Michael Feldbaum, Justin Jia-Jen Hwu, David S. Kuo, Gennady Gauzner, Kim Y. Lee | 2016-03-15 |