Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9453801 | Photoemission monitoring of EUV mirror and mask surface contamination in actinic EUV systems | Li-Ping Wang, Yanwei Liu, Alan Aindow | 2016-09-27 |
| 9348214 | Spectral purity filter and light monitor for an EUV reticle inspection system | Li-Ping Wang, Frank Chilese, David Alles | 2016-05-24 |