Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448343 | Segmented mirror apparatus for imaging and method of using the same | Frank Chilese | 2016-09-20 |
| 9318870 | Deep ultra-violet light sources for wafer and reticle inspection systems | Gang Lei | 2016-04-19 |