Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9335637 | Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation | Gildardo Delgado | 2016-05-10 |
| 9295147 | EUV light source using cryogenic droplet targets in mask inspection | Alexander N. Bykanov, Oleg Khodykin | 2016-03-22 |