Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9420678 | System and method for producing an exclusionary buffer gas flow in an EUV light source | Alexander N. Bykanov | 2016-08-16 |
| 9295147 | EUV light source using cryogenic droplet targets in mask inspection | Alexander N. Bykanov, Daniel Wack | 2016-03-22 |