Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519093 | Broadband and wide field angle compensator | Lawrence D. Rotter, Klaus Flock, Muzammil Arain | 2016-12-13 |
| 9400246 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2016-07-26 |
| 9310290 | Multiple angles of incidence semiconductor metrology systems and methods | Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer, Catalin Filip +3 more | 2016-04-12 |
| 9228943 | Dynamically adjustable semiconductor metrology system | Guorong V. Zhuang, Johannes D. de Veer, Kevin Peterlinz, Shankar Krishnan | 2016-01-05 |