Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470639 | Optical metrology with reduced sensitivity to grating anomalies | Shankar Krishnan, Lanhua Wei, Walter D. Mieher, Paul Aoyagi | 2016-10-18 |
| 9404872 | Selectably configurable multiple mode spectroscopic ellipsometry | Haiming Wang, Shankar Krishnan, Klaus Flock, Johannes D. de Veer | 2016-08-02 |
| 9228943 | Dynamically adjustable semiconductor metrology system | David Y. Wang, Johannes D. de Veer, Kevin Peterlinz, Shankar Krishnan | 2016-01-05 |