Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470639 | Optical metrology with reduced sensitivity to grating anomalies | Guorong V. Zhuang, Shankar Krishnan, Walter D. Mieher, Paul Aoyagi | 2016-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470639 | Optical metrology with reduced sensitivity to grating anomalies | Guorong V. Zhuang, Shankar Krishnan, Walter D. Mieher, Paul Aoyagi | 2016-10-18 |