Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470639 | Optical metrology with reduced sensitivity to grating anomalies | Guorong V. Zhuang, Shankar Krishnan, Lanhua Wei, Paul Aoyagi | 2016-10-18 |
| 9347879 | Apparatus and methods for detecting overlay errors using scatterometry | Michael Adel, Mark Ghinovker | 2016-05-24 |