Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9404872 | Selectably configurable multiple mode spectroscopic ellipsometry | Haiming Wang, Guorong V. Zhuang, Shankar Krishnan, Klaus Flock | 2016-08-02 |
| 9310290 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Catalin Filip +3 more | 2016-04-12 |
| 9228943 | Dynamically adjustable semiconductor metrology system | David Y. Wang, Guorong V. Zhuang, Kevin Peterlinz, Shankar Krishnan | 2016-01-05 |