Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412673 | Multi-model metrology | In-Kyo Kim, Xin Li, Leonid Poslavsky, Liequan Lee, Meng Cao +2 more | 2016-08-09 |
| 9311431 | Secondary target design for optical measurements | Andrei V. Shchegrov, Thaddeus Gerard Dziura, Inkyo Kim, Seunghwan Lee, ByeoungSu Hwang +1 more | 2016-04-12 |