Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482961 | Microlithography projection optical system, tool and method of production | Hans-Juergen Mann | 2016-11-01 |
| 9465300 | Catoptric objectives and systems using catoptric objectives | Hans-Juergen Mann, Marco Pretorius | 2016-10-11 |
| 9316922 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Daniel Kraehmer, Norbert Wabra | 2016-04-19 |
| 9304407 | Catoptric objectives and systems using catoptric objectives | Hans-Juergen Mann, David Shafer | 2016-04-05 |