Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470872 | Reflective optical element | Boris Bittner, Sonja Schneider, Ricarda Schneider, Hendrik Wagner, Rumen Iliew +1 more | 2016-10-18 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2016-09-06 |
| 9372411 | Projection objective of a microlithographic projection exposure apparatus | Johannes Zellner, Boris Bittner, Martin von Hodenberg, Sonja Schneider, Ricarda Schoemer +4 more | 2016-06-21 |
| 9348234 | Microlithographic apparatus | Boris Bittner, Sonja Schneider, Ricarda Schoemer, Martin von Hodenberg, Hendrik Wagner +1 more | 2016-05-24 |
| 9316922 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer | 2016-04-19 |
| 9280058 | Projection objective for a microlithographic projection exposure apparatus | Robert Eder | 2016-03-08 |
| 9235143 | Microlithographic projection exposure apparatus | Boris Bittner | 2016-01-12 |